FULL DESCRIPTION of Item 119294 in

Cluster Plasma Tools - Oxide

Deal directly with: Capovani Brothers Inc. of Scotia, NY


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1 Offered at Best Price

TRION TECHNOLOGY ICP OXIDE ETCHER

Dielectic Cluster Tool

Trion Technology Oracle

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Unit Price Unstated

Number of Units 1

Manufacturer Trion Technology

Model Oracle

Wafer Size Range
  Minimum 50 mm

  Maximum 200 mm

  Set Size 200 mm

Number of Chambers 1

Process Capabilities Oxide Etch

Chamber 1 Description RIE Dielectric Etch
Phantom III RIE Reactor

Controller Type PC Controller Type

Elevator Type Brooks Automation VCE 6

Process Gases CF4, CHF3, Ar, O2

Other Information Central Vacuum
Transport (CVT) Platform
High Conductance Plenum and Vacuum System
Manual Wafer Load Port
Automatic Pressure Control
600 Watt, 13.56 MHz RF Generator
DC Bias Control
Brooks Automation VCE6 Vacuum Cassette Elevator
(2) Ebara ESR20N 2,000 LPM Dry Pumps,

Power Requirements 208 V     49.0 A     60 Hz     3 Phase

Year of Manufacture 2006

Source: (click name below to visit its website directly)

  Capovani Brothers Inc. of Scotia, NY

Shipping & Handling:

Unless otherwise stated, all items are fully tested and sold with our standard ninety day warranty, which is described in our terms and conditions.
Domestic and International shipments: Ex Works, Scotia, NY. All freight cost estimates are for dock to dock service only.
Any additional services, i.e. lift-gate, inside or residential delivery, must be requested at the time of sale and will be billed accordingly.
CBI is not responsible for any damage incurred during shipment. It is the buyer's responsibility to inspect packages for damage and to note any damage on bill of lading.
Please feel free to call us with any questions. (Phone: 518.346.8347, Fax: 518.381.9578).

Payment:

Minimum order of $50 required.
We offer terms of net 30 days to all companies that have established credit with Capovani Brothers Inc. and have paid within terms.
All federal, state, local governments and their agencies, as well as institutions of higher learning automatically receive terms.
All other sales, including foreign sales, are prepayment only.
MasterCard, VISA, Discover and AMEX are accepted at sellers discretion.

Domestic Terms and Conditions

International Terms and Conditions

Deal directly with:  Capovani Brothers Inc. of Scotia, NY

  MAKE OFFER     MAKE INQUIRY

Assets 2 Market 704 Corporations Park Scotia, New York 12302 United States • phone: 518-688-0526 • sales@assets2market.com

FULL DESCRIPTION of Item 119294 in

1 Offered at Best Price

TRION TECHNOLOGY ICP OXIDE ETCHER

**1 Offered at Best Price**